共 50 条
Picosecond high-power 213-nm deep-ultraviolet laser generation using ß-BaB2O4 crystal
被引:21
|作者:
Chu, Yuxi
[1
]
Zhang, Xudong
[1
]
Chen, Binbin
[2
]
Wang, Jiazan
[2
]
Yang, Junhong
[3
]
Jiang, Rui
[2
,4
]
Hu, Minglie
[1
]
机构:
[1] Tianjin Univ, Sch Precis Instruments & Optoelect Engn, Minist Educ, Ultrafast Laser Lab,Key Lab Optoelect Informat S, Tianjin 300072, Peoples R China
[2] Beijing RS Laser Optoelect Technol CO Ltd, Beijing 100176, Peoples R China
[3] Key & Core Technol Innovat Inst Greater Bay Area, Shenzhen 510670, Guangdong, Peoples R China
[4] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
来源:
基金:
美国国家科学基金会;
关键词:
High power;
Picosecond;
Fifth-harmonics generation;
Deep-ultraviolet;
NM;
SILICON;
PULSES;
4TH;
D O I:
10.1016/j.optlastec.2020.106657
中图分类号:
O43 [光学];
学科分类号:
070207 ;
0803 ;
摘要:
In this study, we successfully demonstrate the achievement of 1.37 W average power for a picosecond deep ultraviolet (DUV) laser at 213 nm with a 1 MHz repetition rate using beta-BaB2O4 (BBO) crystals, which is the highest output power of a 213 nm picosecond laser system with an all-solid-state setup so far. The laser system generates over 1.3 mu J 213-nm pulse energy. The fifth harmonic is generated by sum-frequency generation of the 532 and 355 nm beams based on a "2 + 3" scheme. BBO crystals with lengths of 6, 8, and 10 mm are investigated. Furthermore, the DUV laser system produces a high-beam quality and narrow linewidth output. The DUV system can be stably maintained over 100 h with expanded beam sizes of 532 and 355 nm at 800 mW, and without requiring a change in the positions and temperatures of nonlinear crystals.
引用
收藏
页数:5
相关论文