Picosecond high-power 213-nm deep-ultraviolet laser generation using ß-BaB2O4 crystal

被引:21
|
作者
Chu, Yuxi [1 ]
Zhang, Xudong [1 ]
Chen, Binbin [2 ]
Wang, Jiazan [2 ]
Yang, Junhong [3 ]
Jiang, Rui [2 ,4 ]
Hu, Minglie [1 ]
机构
[1] Tianjin Univ, Sch Precis Instruments & Optoelect Engn, Minist Educ, Ultrafast Laser Lab,Key Lab Optoelect Informat S, Tianjin 300072, Peoples R China
[2] Beijing RS Laser Optoelect Technol CO Ltd, Beijing 100176, Peoples R China
[3] Key & Core Technol Innovat Inst Greater Bay Area, Shenzhen 510670, Guangdong, Peoples R China
[4] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
来源
基金
美国国家科学基金会;
关键词
High power; Picosecond; Fifth-harmonics generation; Deep-ultraviolet; NM; SILICON; PULSES; 4TH;
D O I
10.1016/j.optlastec.2020.106657
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In this study, we successfully demonstrate the achievement of 1.37 W average power for a picosecond deep ultraviolet (DUV) laser at 213 nm with a 1 MHz repetition rate using beta-BaB2O4 (BBO) crystals, which is the highest output power of a 213 nm picosecond laser system with an all-solid-state setup so far. The laser system generates over 1.3 mu J 213-nm pulse energy. The fifth harmonic is generated by sum-frequency generation of the 532 and 355 nm beams based on a "2 + 3" scheme. BBO crystals with lengths of 6, 8, and 10 mm are investigated. Furthermore, the DUV laser system produces a high-beam quality and narrow linewidth output. The DUV system can be stably maintained over 100 h with expanded beam sizes of 532 and 355 nm at 800 mW, and without requiring a change in the positions and temperatures of nonlinear crystals.
引用
收藏
页数:5
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