Self-referenced interferometer for cylindrical surfaces

被引：5
|
作者：
Sarbort, Martin [1 ]
Rerucha, Simon [1 ]
Hola, Miroslava [1 ]
Buchta, Zdenek [1 ]
Lazar, Josef [1 ]
机构：
[1] Inst Sci Instruments CAS, Vvi, Brno 61264, Czech Republic
来源：
APPLIED OPTICS | 2015年 / 54卷 / 33期
关键词：
GRAZING-INCIDENCE INTERFEROMETRY; ROD OBJECTS; BEAMS;
D O I：
10.1364/AO.54.009930
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We present a new interferometric method for shape measurement of hollow cylindrical tubes. We propose a simple and robust self-referenced interferometer where the reference and object waves are represented by the central and peripheral parts, respectively, of the conical wave generated by a single axicon lens. The interferogram detected by a digital camera is characterized by a closed- fringe pattern with a circular carrier. The interference phase is demodulated using spatial synchronous detection. The capabilities of the interferometer are experimentally tested for various hollow cylindrical tubes with lengths up to 600 mm. (C) 2015 Optical Society of America
引用
收藏
页码：9930 / 9938
页数：9
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