A MEMS-based variable micro-lens system

被引：91
|
作者：
Krogmann, F. [1 ]
Moench, W. [1 ]
Zappe, H. [1 ]
机构：
[1] Univ Freiburg, Dept Microsyst Engn IMTEK, D-7800 Freiburg, Germany
来源：
JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS | 2006年 / 8卷 / 07期
关键词：
electro-wetting; liquid lens; micro-lens; variable lens; optical fluids; micro-opto-electro-mechanical systems; silicon technology; centring structure;
D O I：
10.1088/1464-4258/8/7/S06
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We present a tunable liquid micro-lens system exhibiting a tuning range of back focal length between 2.3 mm and infinity achieved by applying a voltage of 0-45 V. The lens actuation mechanism is based on electro-wetting on dielectrics (EWOD) and the system is fabricated in MEMS technology. In this system, two density-matched optical fluids are located in a centring structure which was defined by an anisotropic etching process. The system design provides an initial back focal length of a few millimetres and is robust against shocks and vibrations.
引用
收藏
页码：S330 / S336
页数：7
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