Micro/nano patterning characteristics in hot embossing process

The hot embossing process has been known as one of major nano replication techniques. This is due to its simple process, low cost, high replication fidelity and relatively high throughput. As the initial step of quantitating the hot embossing process, simple parametric studies for the embossing time have been carried out using high-resolution masters which patterned by DRIE process and laser machining. Under different embossing times, the viscous flow of thin PMMA films into micro cavities under the compression force has been investigated. Also, the viscous flow during the embossing process was simulated by the continuum based FDM analysis considering micro/nano effect, such as surface tension and contact angle.