Gas-assisted light-cure microstructure transfer molding and transfer transformation

被引:1
|
作者
Weng, Yung-Jin [1 ,2 ]
Chang, Che-Lin [1 ]
Hsiao, Yi-Hui [1 ]
机构
[1] Natl Chiayi Univ, Dept Mech & Energy Engn, 300 Syuefu Rd, Chiayi 600, Taiwan
[2] Natl Chiayi Univ, Ctr Energy Res & Sensor Technol, 300 Syuefu Rd, Chiayi 600, Taiwan
来源
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2017年 / 23卷 / 04期
关键词
REPLICATION; INJECTION;
D O I
10.1007/s00542-016-2823-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This study conducted technical research into gas-assisted light-cure transfer molding and transfer transformation. With the self-developed light-cure transfer molding system, we created the system devices through mechanical processing. Then, the soft micro-nanometer structure was combined with different gas pressures and experimental parameters to explore the formation of micro-structural components. Meanwhile, the gas pressure was increased to achieve transfer transformation and analysis. According to the experimental results, the duplicated formation would lead to complete formation with the increased gas pressure. Moreover, this study indicated that excessive gas pressure would transform the microstructure, and then change the height and shape of the micro-structural components after transfer molding. This study also analyzed the transformation to gain information regarding transfer molding and transformation under the conditions, and thus, obtain the array microstructure of various forms. It is predicted that this study can be regarded as an option for the fabrication of micro-systematic structural components.
引用
收藏
页码:1081 / 1090
页数:10
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