DESIGN OF CAPACITIVE MEMS MICROPHONE FOR FULLY IMPLANTABLE COCHLEAR IMPLANTS

Application of capacitive mems microphone in a fully implantable cochlear implant is vital, mems structure have disability resonates to a soft and loud sound. In the current marketplace, this problem is tackled by manual adjustment in the digital device. To improve this drawback, sensitivity and linearity of the membrane have been improved to overcome the disability of hearing a soft and loud sound is detailed in this paper. Several structures have been studied to optimize the sensitivity and linearity by using the Taguchi optimization method. The best design is being verified from this methodology. This design produces high sensitivity 0.18pF/Pa, linearity 0.0011pF/mu m and mechanical sensitivity of 35.6 mu m/Pa comparable to an existing design. This innovative design can improve current commercial cochlear implant by being able to hear the soft and loud sound without any manual adjustment.