Atomic force microscopy using an integrated comb-shape electrostatic actuator for high-speed feedback motion

被引：20
|
作者：
Akiyama, T [1 ]
Staufer, U [1 ]
de Rooij, NF [1 ]
机构：
[1] Univ Neuchatel, Inst Microtechnol, CH-2007 Neuchatel, Switzerland
来源：
APPLIED PHYSICS LETTERS | 2000年 / 76卷 / 21期
关键词：
D O I：
10.1063/1.126549
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A microfabricated cantilever with integrated comb-shape electrostatic actuator is proposed to yield a high-speed feedback motion in atomic force microscopy with optical deflection detection. The actuator has a linear response to the driving voltage. The dynamic range of tip amounts to 1 mu m with an actuation efficiency of 11.4 nm/V. Using this cantilever, an imaging bandwidth of similar to 80 kHz was obtained. High-speed constant force imaging with a tip velocity of 1.22 mm/s is demonstrated. The tip-sample force is verified to be constant by using a cantilever with an integrated piezoresistor as the scanned sample. (C) 2000 American Institute of Physics. [S0003-6951(00)05321-3].
引用
收藏
页码：3139 / 3141
页数：3
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