Atomic force microscopy using an integrated comb-shape electrostatic actuator for high-speed feedback motion

A microfabricated cantilever with integrated comb-shape electrostatic actuator is proposed to yield a high-speed feedback motion in atomic force microscopy with optical deflection detection. The actuator has a linear response to the driving voltage. The dynamic range of tip amounts to 1 mu m with an actuation efficiency of 11.4 nm/V. Using this cantilever, an imaging bandwidth of similar to 80 kHz was obtained. High-speed constant force imaging with a tip velocity of 1.22 mm/s is demonstrated. The tip-sample force is verified to be constant by using a cantilever with an integrated piezoresistor as the scanned sample. (C) 2000 American Institute of Physics. [S0003-6951(00)05321-3].