Analysis of the resolution enhancement in laser-induced TiO2 nanostructured materials

被引：2

作者：

Xia, Feng ^{[1
,2
]}

Li, Shixia ^{[1
,2
]}

Zhang, Kun ^{[1
,2
]}

Kong, Weijin ^{[1
,2
]}

Yun, Maojin ^{[1
,2
]}

机构：

[1] Qingdao Univ, Coll Phys, Qingdao 266071, Peoples R China

[2] Qingdao Univ, Key Lab Photon Mat & Technol Univ Shandong, Qingdao 266071, Peoples R China

来源：

OPTICAL MATERIALS EXPRESS | 2021年 / 11卷 / 01期

基金：

中国国家自然科学基金; 中国博士后科学基金;

关键词：

INDUCED OXIDATION; TITANIUM; GROWTH; FILMS;

D O I：

10.1364/OME.412870

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Laser direct writing titanium dioxide (TiO2) nanostructured materials have been widely studied in recent years. Analysis of the kinetics of laser-induced titanium oxidation and an exploration of the key factors for improving resolution are meaningful. In this paper, we propose a simulation model of TiO2/Ti film to study the kinetics of the laser-induced titanium oxidation process. We compared the time-varying oxide thickness with temperature, and analyzed the oxidation degrees, maximum temperature, and the laser-induced Mott potential distribution along the radial direction for laser power changes from 2.8 mW to 3.4 mW. We found that the laser-induced Mott potential is the more crucial factor in the determination of the final oxidation degrees. An effective way to improve the laser machining resolution is to apply the threshold power and short-duration pulse laser irradiates on the film repetitively. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

引用

页码：136 / 141

页数：6

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