Characterization of optical coatings using a multisource table-top scatterometer

被引：14

作者：

von Finck, Alexander ^{[1
]}

Herffurth, Tobias ^{[1
]}

Schroeder, Sven ^{[1
]}

Duparre, Angela ^{[1
]}

Sinzinger, Stefan ^{[2
]}

机构：

[1] Fraunhofer Inst Appl Opt & Precis Engn IOF, D-07745 Jena, Germany

[2] Tech Univ Ilmenau, Fachgebiet Tech Opt, D-98693 Ilmenau, Germany

来源：

APPLIED OPTICS | 2014年 / 53卷 / 04期

关键词：

ANGLE-RESOLVED SCATTERING; THIN-FILM COATINGS; ATOMIC-FORCE MICROSCOPY; LIGHT-SCATTERING; MULTILAYER OPTICS; ROUGHNESS; SURFACE; FINISH; MICROSTRUCTURE; REFLECTANCE;

D O I：

10.1364/AO.53.00A259

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Light scattering measurement and analysis is a powerful tool for the characterization of optical and nonoptical surfaces. To enable a more comprehensive postmeasurement characterization, three visible laser sources were recently implemented in a highly sensitive table-top scatterometer with 3D spherical detection capability. Based on wavelength scaling, the instrument is utilized to characterize thin-film coatings and their substrates with respect to surface roughness, roughness growth, and contamination. Topographic measurement techniques are used to verify the results. The spectral sensitivity to contamination (scatter loss) is demonstrated to be significantly different for single surfaces and interference coatings. In addition, power losses of a highly reflective coating are analyzed. (C) 2014 Optical Society of America

引用

页码：A259 / A269

页数：11

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