Two-dimensional photonic crystals from semiconductor material with polymer filled holes

被引:0
|
作者
van der Heijden, Rob [1 ,2 ,3 ]
Kjellander, Charlotte [3 ,4 ]
Carlstrom, Carl-Fredrik [1 ,2 ,3 ]
Snijders, Juri [1 ,2 ,3 ]
van der Heijden, Rob W. [1 ,2 ,3 ]
Bastiaansen, Kees [4 ]
Broer, Dick [4 ]
Karouta, Fouad [1 ,2 ]
Notzel, Richard [1 ,2 ,3 ]
van der Drift, Emile [5 ]
Salemink, Huub W. M. [1 ,2 ,3 ,5 ]
机构
[1] Eindhoven Univ Technol, COBRA Interuniv Res Inst, POB 513, NL-5600 MB Eindhoven, Netherlands
[2] Eindhoven Univ Technol, Ctr NanoMat, NL-5600 MB Eindhoven, Netherlands
[3] Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands
[4] Eindhoven Univ Technol, Dept Chem & Chem Engn, NL-5600 MB Eindhoven, Netherlands
[5] Delft Univ Technol, Kavli Inst Nanosci, NL-2600 GB Delft, Netherlands
关键词
infiltration; photonic crystal; InP;
D O I
10.1117/12.662660
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Polymer filling of the air holes of indiumphosphide based two-dimensional photonic crystals is reported. The filling is performed by infiltration with a liquid monomer and solidification of the infill in situ by thermal polymerization. Complete hole filling is obtained with infiltration under ambient pressure. This conclusion is based both on cross-sectional scanning electron microscope inspection of the filled samples as well as on optical transmission measurements.
引用
收藏
页数:7
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