Comparative investigation on the characteristics of glow discharge plasma using glow discharge mass spectrometry and glow discharge optical emission spectrometry
被引:11
|
作者:
Wagatsuma, K
论文数: 0引用数: 0
h-index: 0
机构:Tohoku Univ, Inst Mat Res, Aoba Ku, Sendai, Miyagi 9808577, Japan
Wagatsuma, K
Saka, T
论文数: 0引用数: 0
h-index: 0
机构:Tohoku Univ, Inst Mat Res, Aoba Ku, Sendai, Miyagi 9808577, Japan
Saka, T
Yamaguchi, M
论文数: 0引用数: 0
h-index: 0
机构:Tohoku Univ, Inst Mat Res, Aoba Ku, Sendai, Miyagi 9808577, Japan
Yamaguchi, M
Ito, K
论文数: 0引用数: 0
h-index: 0
机构:Tohoku Univ, Inst Mat Res, Aoba Ku, Sendai, Miyagi 9808577, Japan
Ito, K
机构:
[1] Tohoku Univ, Inst Mat Res, Aoba Ku, Sendai, Miyagi 9808577, Japan
[2] Daido Inst Technol, Dept Elect Engn & Elect, Minami Ku, Nagoya, Aichi 4578530, Japan
[3] Daido Bunseki Res Inc, Minami Ku, Nagoya, Aichi 4578545, Japan
[4] Daido Steel Co Ltd, Res & Dev Lab, Minami Ku, Nagoya, Aichi 4578545, Japan
In glow discharge mass spectrometry ( GDMS) and glow discharge optical emission spectrometry ( GDOES), variations in the signal intensities against the discharge parameters: current, voltage, and the pressure of plasma gas, are compared to clarify their excitation/ ionization processes responsible to each signal. The behaviors are dependent on the discharge mode, i. e., constant- voltage and constant- pressure conditions. Under the constant- voltage conditions where the gas pressure is varied, the ion intensities in GDMS have a maximum and then decrease at higher discharge currents, while the emission intensities in GDOES monotonically increase along with the discharge current. On the other hand, similar dependence of their signal intensities on the discharge current is observed under the constant- pressure conditions. These results indicate that the transport process of analyte ions produced in the plasma play an important role in determining the ion intensities in GDMS.