Low-Loss Unidirectional Acoustic Focusing Transducer in Thin-Film Lithium Niobate

被引:8
|
作者
Lu, Ruochen [1 ]
Yang, Yansong [1 ]
Gong, Songbin [1 ]
机构
[1] Univ Illinois, Dept Elect & Comp Engn, Urbana, IL 61801 USA
关键词
Transducers; Acoustics; Focusing; Lithium niobate; Anisotropic magnetoresistance; Shape; Electrodes; Acoustic delay line (ADL); lithium niobate; microelectromechanical systems (MEMS); piezoelectricity; power flow angle; S0; mode; wave focusing transducer; GRATING COUPLER; WAVE DEVICE; RESONATORS; DESIGN;
D O I
10.1109/TUFFC.2020.3011624
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
In this work, we present gigahertz low-loss unidirectional acoustic focusing transducers in thin-film lithium niobate. The design follows the anisotropy of fundamental symmetric (S0) waves in X-cut lithium niobate. The implemented acoustic delay line testbed consisting of a pair of the proposed transducers shows a low insertion loss of 4.2 dB and a wide fractional bandwidth of 7.5 at 1 GHz. The extracted transducer loss is 1.46 dB, and the propagation loss of the S0 waves is 0.0126 dB/$\mu \text{m}$. The design framework is readily extendable to other acoustic modes, given consideration on the optimal orientation for power flow and electromechanical transduction.
引用
收藏
页码:2731 / 2737
页数:7
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