Tribological properties in a high vacuum of carbon films containing titanium prepared by magnetron sputtering

Carbon films containing titanium on a stainless-steel substrate were prepared using two magnetron sputtering sources with a target of titanium and carbon. These prepared films were analyzed by X-ray photoelectron spectroscopy to determine the chemical state and the atomic composition, and by Raman spectroscopy and by X-ray diffraction to define the film microstructure. The tribological properties were measured by a tribo-tester of a pin-on-disk type in a high vacuum chamber. The wear surface was observed by a scanning laser microscope and a scanning electron microscope. The friction coefficients of TixC1-x films measured in an air atmosphere showed lower values than those measured in a high vacuum, because oxygen and moisture contained in air played the role of lubricants. The carbon film with a small dose of titanium showed the minimum value on abrasion quantity of the film worn in a high vacuum. (C) 2004 Elsevier Ltd. All rights reserved.