Characterization of Latent 3D Laser Photoexposure Patterns in Photoresist Created by Direct Laser Writing

被引：0
|
作者：
Yulianto, Edy [1 ]
Chatterjee, Subhashri [1 ]
Mizeikis, Vygantas [1 ]
机构：
[1] Shizuoka Univ, Res Inst Elect, 3-5-1 Johoku, Hamamatsu, Shizuoka 4328011, Japan
来源：
MATERIALS TODAY-PROCEEDINGS | 2019年 / 13卷
关键词：
direct laser writing (DLW); photoluminescence (PL); photoexposure; quenching; threshold;
D O I：
10.1016/j.matpr.2019.03.205
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We describe photoluminescence quenching method for use in characterizing 3D laser photoexposure patterns in photoresist recorded during direct laser writing prior to development. By scanning a focused laser beam through the exposed patterns in the photoresist, important features of the photoexposure patterns, such as their size and shape, and the exposure threshold can be determined. (C) 2019 Elsevier Ltd. All rights reserved.
引用
收藏
页码：149 / 153
页数：5
相关论文
共 50 条
  • [1] 3D Direct Laser Writing of Highly Absorptive Photoresist for Miniature Optical Apertures
    Schmid, Michael D.
    Toulouse, Andrea
    Thiele, Simon
    Mangold, Simon
    Herkommer, Alois M.
    Giessen, Harald
    [J]. ADVANCED FUNCTIONAL MATERIALS, 2023, 33 (39)
  • [2] Imaging of latent three-dimensional exposure patterns created by direct laser writing in photoresists
    Yulianto, Edy
    Chatterjee, Subhashri
    Purlys, Vytautas
    Mizeikis, Vygantas
    [J]. APPLIED SURFACE SCIENCE, 2019, 479 : 822 - 827
  • [3] 3D direct laser writing using a 405 nm diode laser
    Mueller, Patrick
    Thiel, Michael
    Wegener, Martin
    [J]. OPTICS LETTERS, 2014, 39 (24) : 6847 - 6850
  • [4] 3D direct laser writing of Petabyte Optical Disk
    Pavel, E.
    Jinga, S. I.
    Vasile, B. S.
    Dinescu, A.
    Trusca, R.
    Tosa, N.
    [J]. OPTICS AND LASER TECHNOLOGY, 2015, 71 : 45 - 49
  • [5] 3D laser direct writing for advanced photonic integration
    Psaila, Nicholas
    [J]. OPTICAL INTERCONNECTS XIX, 2019, 10924
  • [6] Direct scanning laser writing of 3D multulayer microstructures
    Yu, H
    Li, B
    Zhang, X
    [J]. NSTI NANOTECH 2004, VOL 1, TECHNICAL PROCEEDINGS, 2004, : 461 - 464
  • [7] Direct laser writing of 3D electrodes on flexible substrates
    Brown, Morgan A.
    Zappitelli, Kara M.
    Singh, Loveprit
    Yuan, Rachel C.
    Bemrose, Melissa
    Brogden, Valerie
    Miller, David J.
    Smear, Matthew C.
    Cogan, Stuart F.
    Gardner, Timothy J.
    [J]. NATURE COMMUNICATIONS, 2023, 14 (01)
  • [8] Designable 3D nanofabrication by femtosecond laser direct writing
    Zhang, Yong-Lai
    Chen, Qi-Dai
    Xia, Hong
    Sun, Hong-Bo
    [J]. NANO TODAY, 2010, 5 (05) : 435 - 448
  • [9] Direct laser writing of 3D electrodes on flexible substrates
    Morgan A. Brown
    Kara M. Zappitelli
    Loveprit Singh
    Rachel C. Yuan
    Melissa Bemrose
    Valerie Brogden
    David J. Miller
    Matthew C. Smear
    Stuart F. Cogan
    Timothy J. Gardner
    [J]. Nature Communications, 14
  • [10] DIRECT LASER WRITING OF 3D MICROSTRUCTURES FOR PHOTOCATALYTIC APPLICATIONS
    Syngelakis, Ioannis
    Kabouraki, Elmina
    Kenanakis, George
    Klini, Argyro
    Farsari, Maria
    [J]. 2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE & EUROPEAN QUANTUM ELECTRONICS CONFERENCE (CLEO/EUROPE-EQEC), 2021,
12345