On-chip magnetoresistive detection of resonance in microcantilevers

被引：16
|
作者：
Patil, S. B. [1 ,2 ]
Guedes, A. [1 ,2 ,3 ]
Freitas, P. P. [1 ,2 ,3 ]
Cardoso, S. [1 ,2 ,3 ]
Chu, V. [1 ,2 ]
Conde, J. P. [1 ,2 ,4 ]
机构：
[1] INESC Microsistemas & Nanotecnol, P-1000029 Lisbon, Portugal
[2] IN Inst Nanosci & Nanotechnol, P-1000029 Lisbon, Portugal
[3] Univ Tecn Lisboa, Dept Phys, Inst Super Tecn, P-1049001 Lisbon, Portugal
[4] Univ Tecn Lisboa, Dept Biol & Chem Engn, Inst Super Tecn, P-1049001 Lisbon, Portugal
来源：
APPLIED PHYSICS LETTERS | 2009年 / 95卷 / 02期
关键词：
amorphous semiconductors; cantilevers; chromium alloys; cobalt alloys; elemental semiconductors; magnetic sensors; magnetic thin films; magnetoresistance; micromechanical devices; permanent magnets; platinum alloys; silicon; spin valves; SENSORS; SILICON; DEVICES;
D O I：
10.1063/1.3174912
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Magnetoresistive spin-valve sensors were used to provide on-chip detection of the mechanical resonance of a thin silicon microelectromechanical systems cantilever. The spin-valve sensor was placed underneath the free end of the cantilever. A CoCrPt thin-film permanent magnet was placed on top of the amorphous silicon/Al cantilever. The cantilever was electrostatically actuated and its deflection creates a change in the magnetic field that can be sensed by the spin-valve sensor. The resonance frequency of the structure in the megahertz range is detected by the measurement of the spin-valve sensor output. Minimum deflection detection limit is determined to be 0.06 A degrees/Hz(1/2).
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页数：3
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