Composition analysis using elastic recoil detection

被引：0

作者：

Görgens, L ^{[1
]}

Dollinger, G

Bergmaier, A

Ambacher, O

Eastman, L

Smart, JA

Shealy, JF

Dimitrov, R

Stutzmann, M

Mitchell, A

机构：

[1] Tech Univ Munich, Phys Dept E12, D-85748 Garching, Germany

[2] Cornell Univ, Sch Elect Engn, Ithaca, NY 14853 USA

[3] Tech Univ Munich, Walter Schottky Inst, D-85748 Garching, Germany

来源：

PHYSICA STATUS SOLIDI B-BASIC RESEARCH | 1999年 / 216卷 / 01期

关键词：

D O I：

10.1002/(SICI)1521-3951(199911)216:1<679::AID-PSSB679>3.0.CO;2-L

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

We report quantitative ERD (Elastic Recoil Detection) measurements for the determination of the composition and distribution of the elements in nitride heterostructures. The investigated samples were MOCVD (molecular chemical vapor deposition) and PIMBE (plasma induced molecular beam epitaxy) grown HEMT (high electron mobility transistor) structures from Cornell University. We present the measured Al distribution parallel to the growth direction of AlxGa1-xN layers of a thickness of about 10 to 30 nm and an Al concentration of x = 0.1 to 0.7. The results are compared with HRXRD (high resolution X-ray diffraction) measurements.

引用

页码：679 / 682

页数：4

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