Formation of gaseous and polymer products in a glow discharge in tetrafluoroethylene and hexafluorobenzene

The plasmochemical conversion of tetrafluoroethylene and hexafluorobenzene to the final products of electric discharge synthesis is discussed. Several modes of this process were studied: the synthesis of gaseous products, of a polymer on the surface of the electrodes, and of aerosol particles in the reactor. It was shown that the monomer decomposition rate increases linearly with the discharge current but appears to be pressure-independent. This is indicative of the electron energy distribution function being dependent on the pressure in the reactor. Based on the experimental data, a phenomenological model was developed capable of predicting the consumption of the initial compounds and the formation of the final gaseous and polymer products, including disperse particles. The model predictions were found to be in close agreement with the experimental results.