Parameter Identification of Piezoelectric AlGaN/GaN Beam Resonators by Dynamic Measurements

被引：0
|
作者：
Michael, S. [1 ]
Brueckner, K. [2 ]
Niebelschuetz, F. [2 ]
Tonisch, K. [2 ]
Schaeffel, Ch [1 ]
机构：
[1] Inst Microelect & Mechatron Syst, D-98693 Ilmenau, Germany
[2] Ilmenau Univ Technol, Inst Micro & Nanotechnol, D-98693 Ilmenau, Germany
来源：
EUROSIME 2009: THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICRO-ELECTRONICS AND MICRO-SYSTEMS | 2009年
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A fast identification method which provides the determination of different mechanical parameters of a particular device under test has been investigated for application to micro-electromechanical beam resonators. By performing optical measurements, the frequency-dependent mechanical out-of-plane displacement has been recorded to determine the modal resonant frequencies of a selected resonator. An automated optimization algorithm has been employed which compares the measurement data with the results from finite element Simulations to obtain geometric and material characteristics like beam length and intrinsic stress of the devices after fabrication.
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页码：591 / +
页数：2
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