Effect of TiOx seed layer on the texture and electric properties in La and Ca modified PbTiO3 thin films

被引：4
|
作者：
Chi, Q. G. [1 ]
Li, W. L. [1 ]
Liu, C. Q. [1 ]
Wang, J. M. [1 ]
Fei, W. D. [1 ]
机构：
[1] Harbin Inst Technol, Sch Mat Sci & Engn, Harbin 150001, Peoples R China
来源：
THIN SOLID FILMS | 2009年 / 517卷 / 17期
关键词：
PLCT film; TiOx seed layer; High texture; Pyroelectric properties; DIELECTRIC-PROPERTIES; ORIENTATION; POLARIZATION; DEPOSITION; MEMORIES; CRACKING;
D O I：
10.1016/j.tsf.2009.03.025
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Lanthanum-and calcium-modified PbTiO3 (PLCT) ferroelectric thin films were successfully prepared on Pt (111)/Ti/SiO2/Si substrates by pulsed laser deposition. Influence of TiOx seed layer on texture and electric properties of PLCT films was investigated. It is found the PLCT films without seed layer exhibited highly (100)-textured, while using about 9 nm TiOx as seed layer lead to highly (301)-textured. The PLCT film with TiOx seed layer possess higher remnant polarization (Pr = 26 mu C/cm(2)), better pyroelectric coefficient and figure of merit at room temperature (p = 370 mu C/m(2)k, F-d = 190 x 10(-5) Pa-1/2) than that of film without seed layer. The mechanism of the enhanced electric properties was also discussed. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码：4826 / 4829
页数：4
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