共 50 条
- [31] Fabrication and application of diffractive optical elements 6TH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION, 2010, 7544
- [34] Nanofabrication of integrated diffractive optical elements MICROMACHINING TECHNOLOGY FOR MICRO-OPTICS AND NANO-OPTICS, 2003, 4984 : 79 - 88
- [36] Programmable multilayer diffractive optical elements JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1997, 14 (09): : 2223 - 2230
- [37] Optomechanical analysis of diffractive optical elements OPTICAL MODELING AND PERFORMANCE PREDICTIONS VII, 2015, 9577
- [40] Scatterometric characterization of diffractive optical elements INSTRUMENTATION, METROLOGY, AND STANDARDS FOR NANOMANUFACTURING, OPTICS, AND SEMICONDUCTORS VIII, 2014, 9173