Single-crystal film piezoelectric sensors, actuators and energy harvesters with interdigitated electrodes

In this paper, the design and the fabrication of novel devices using single crystal lead zinc niobate-lead titanate (1-x)Pb(Zn1/3Nb2/3)O-3-xPbTiO(3) (PZN-PT) and lead magnesium niobate-lead titanate (1-x)Pb(Mg1/3Nb2/3)O-3-xPbTiO(3) (PMN-PT) are presented. Piezoelectric biosensors using PZN-PT and PMN-PT are discussed. These single-crystal.sensors improve on the existing detection sensitivity of quartz or silicon based devices. The biosensors can be miniaturized through the fabrication of freestanding single crystal films and patterning by ion milling and argon-ion laser etching. A smart cantilever structure using PZN-PT and PMN-PT is also presented. This device possesses both sensing and actuation capabilities, in a single monomorph configuration. Finally, a PMN-PT energy harvester with interdigitated electrodes is demonstrated. The device converts mechanical vibration energy into electrical energy through the piezoelectric effect. A simple PMN-PT energy harvesting beam is integrated into an electrical energy storage device.