High speed optical phased array using high contrast grating all-pass filters

被引：48

作者：

Yang, Weijian ^{[1
]}

Sun, Tianbo ^{[1
]}

Rao, Yi ^{[1
]}

Megens, Mischa ^{[2
]}

Chan, Trevor ^{[2
]}

Yoo, Byung-Wook ^{[1
]}

Horsley, David A. ^{[2
]}

Wu, Ming C. ^{[1
]}

Chang-Hasnain, Connie J. ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

[2] Univ Calif Davis, Dept Mech & Aerosp Engn, Davis, CA 95616 USA

来源：

OPTICS EXPRESS | 2014年 / 22卷 / 17期

基金：

中国国家自然科学基金;

关键词：

D O I：

10.1364/OE.22.020038

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report a high speed 8x8 optical phased array using tunable 1550 nm all-pass filters with ultrathin high contrast gratings (HCGs) as the microelectromechanical-actuated top reflectors. The all-pass filter design enables a highly efficient phase tuning (1.7 pi) with a small actuation voltage (10 V) and actuation displacement of the HCG (50 nm). The microelectromechanical HCG structure facilitates a high phase tuning speed >0.5 MHz. Beam steering is experimentally demonstrated with the optical phased array. (C)2014 Optical Society of America

引用

页码：20038 / 20044

页数：7

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