High-Performance and Tailorable Pressure Sensor Based on Ultrathin Conductive Polymer Film

被引：203
|
作者：
Shao, Qi [1 ]
Niu, Zhiqiang [1 ]
Hirtz, Michael [1 ,2 ,3 ]
Jiang, Lin [1 ]
Liu, Yuanjun [1 ]
Wang, Zhaohui [4 ]
Chen, Xiaodong [1 ]
机构：
[1] Nanyang Technol Univ, Sch Mat Sci & Engn, Singapore 639798, Singapore
[2] Karlsruhe Inst Technol, Inst Nanotechnol INT, D-76021 Karlsruhe, Germany
[3] Karlsruhe Inst Technol, KNMF, D-76021 Karlsruhe, Germany
[4] Chinese Acad Sci, Inst Chem, Beijing Natl Lab Mol Sci, Key Lab Organ Solids, Beijing 100190, Peoples R China
来源：
SMALL | 2014年 / 10卷 / 08期
基金：
新加坡国家研究基金会;
关键词：
pressure sensor; contact resistance; micropillar array; conductive polymer; FIELD-EFFECT TRANSISTORS; OF-THE-ART; LARGE-AREA; ARTIFICIAL SKIN; STRAIN SENSOR; ELECTRONICS; GRAPHENE; DEVICES; MATRIX; ARRAYS;
D O I：
10.1002/smll.201303601
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
A highly sensitive and tailorable pressure sensor is designed based on the variation of contact resistance between an Au covered micropillar array and a conductive polymer film. The sensitivity of such pressure sensors can be tuned from 0.03 kPa-1 to 17 kPa-1 at pressures less than 1 kPa, and a limit of detection of 2 Pa has been demonstrated. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码：1466 / 1472
页数：7
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