High-Performance and Tailorable Pressure Sensor Based on Ultrathin Conductive Polymer Film

被引：203

作者：

Shao, Qi ^{[1
]}

Niu, Zhiqiang ^{[1
]}

Hirtz, Michael ^{[1
,2
,3
]}

Jiang, Lin ^{[1
]}

Liu, Yuanjun ^{[1
]}

Wang, Zhaohui ^{[4
]}

Chen, Xiaodong ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Mat Sci & Engn, Singapore 639798, Singapore

[2] Karlsruhe Inst Technol, Inst Nanotechnol INT, D-76021 Karlsruhe, Germany

[3] Karlsruhe Inst Technol, KNMF, D-76021 Karlsruhe, Germany

[4] Chinese Acad Sci, Inst Chem, Beijing Natl Lab Mol Sci, Key Lab Organ Solids, Beijing 100190, Peoples R China

来源：

SMALL | 2014年 / 10卷 / 08期

基金：

新加坡国家研究基金会;

关键词：

pressure sensor; contact resistance; micropillar array; conductive polymer; FIELD-EFFECT TRANSISTORS; OF-THE-ART; LARGE-AREA; ARTIFICIAL SKIN; STRAIN SENSOR; ELECTRONICS; GRAPHENE; DEVICES; MATRIX; ARRAYS;

D O I：

10.1002/smll.201303601

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A highly sensitive and tailorable pressure sensor is designed based on the variation of contact resistance between an Au covered micropillar array and a conductive polymer film. The sensitivity of such pressure sensors can be tuned from 0.03 kPa-1 to 17 kPa-1 at pressures less than 1 kPa, and a limit of detection of 2 Pa has been demonstrated. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

引用

页码：1466 / 1472

页数：7

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