Measuring the thickness of transparent objects using a confocal displacement sensor

被引:0
|
作者
Weng, Chun-Jen [1 ]
Lu, Bo-Rong [2 ]
Cheng, Pi-Ying [2 ]
Hwang, Chi-Hung [1 ]
Chen, Chih-Yen [1 ]
机构
[1] Natl Appl Res Labs, Instrument Technol Res Ctr, Hsinchu, Taiwan
[2] Natl Chiao Tung Univ, Dept Mech Engn, Hsinchu, Taiwan
关键词
confocal; thickness; varifocal lens;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
this paper reports on a confocal displacement sensor with varifocal lens used to measure the thickness of transparent materials. The focal length of the varifocal lens is adjusted by varying the current. Laser light passing through a transparent target lying within the range of the focal length crosses two interfaces; i.e., first from air to glass and then from glass to air. The signals associated with the interface were of higher intensity than that measure at other points along the z axis. A power meter is used to measure the power and LabVIEW is used to record a power-current graph. The current gap between the two peaks can be translated into values of displacement, indicating the thickness of the material.
引用
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页码:1531 / 1535
页数:5
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