Structural and optical properties investigation of DC magnetron sputtered β-TiO2 thin film

被引：7

作者：

Khan, Shakil ^{[1
]}

Ahmed, Ishaq ^{[2
]}

Shah, A. ^{[3
]}

机构：

[1] Pakistan Inst Engn & Appl Sci, Dept Met & Mat Engn, Islamabad, Pakistan

[2] Quaid i Azam Univ, Natl Ctr Phys, Islamabad, Pakistan

[3] Natl Inst Laser & Optron NILOP, Islamabad, Pakistan

来源：

APPLIED SURFACE SCIENCE | 2014年 / 317卷

关键词：

TiO2; DC magnetron sputtering; XRD; FIR; UV-vis spectroscopy; SOLAR-CELLS; TIO2; DEPOSITION; TEMPERATURE; EVAPORATION; ABSORPTION; OXIDATION; COATINGS; GROWTH;

D O I：

10.1016/j.apsusc.2014.08.131

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Thin films of monoclinic titanium oxide phase (beta-TiO2) have been grown on glass substrate using DC magnetron sputtering technique. The effect of oxygen conditions on the films stoichiometry, growth rate, structure, molecular mode of vibration and optical properties has been investigated. An improvement in stoichiometric ratio (O/Ti) has been observed with the increase of oxygen content in the synthesized chamber. XRD patterns demonstrated the polycrystalline nature of the deposited films with ((2) over bar 11) preferential orientation of beta-TiO2 phase. In the FTIR analysis, a dominant peak at 868 cm(-1) wavenumbers corresponding to the longitudinal optical (LO) mode of monoclinic TiO2 phase was observed at 10% oxygen condition. It shifted to 880 cm(-1) wavenumbers at higher oxygen fractions, illustrated the rise of oxygen concentration in the grown films. The influence of various oxygen conditions on transmittance/extinction coefficient, band gap and refractive index of TiO2 (B) phase is reported. (C) 2014 Elsevier B.V. All rights reserved.

引用

页码：607 / 613

页数：7

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