Tunnel Emission from Nanostructured Field-Emission Array Cathodes with a Fluorine-Carbon Coating

被引：0
|
作者：
Yafarov, R. K. [1 ]
机构：
[1] Russian Acad Sci, Saratov Branch, Kotelnikov Inst Radio Engn & Elect, Saratov 410019, Russia
来源：
TECHNICAL PHYSICS | 2019年 / 64卷 / 06期
基金：
俄罗斯科学基金会;
关键词：
D O I：
10.1134/S1063784219060240
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Variations of the morphology and field-emission properties of surface-structured n- and p-type silicon wafers have been studied. The silicon surface has been structured by etching in a fluorine-carbon plasma and depositing subnanodimensional island carbon masks. It has been shown that surface structuring in a fluorine-carbon plasma makes it possible to reach desired field-emission currents in electric fields of different strengths. Physicochemical models of field emission mechanisms and models of destruction of surface-modified multipoint silicon array cathodes have been considered.
引用
收藏
页码：897 / 901
页数：5
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