Simulation study of total-electron-yield X-ray standing-wave spectra of Mo/SiC/Si/SiC and Mo/Si multilayers

被引：0
|
作者：
Ejima, T [1 ]
Muramatsu, Y [1 ]
Takenaka, H [1 ]
Watanabe, M [1 ]
机构：
[1] Tohoku Univ, IMRAM, Aoba Ku, Sendai, Miyagi 9808577, Japan
来源：
SYNCHROTRON RADIATION INSTRUMENTATION | 2004年 / 705卷
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Total-electron-yield X-ray standing-wave (TEY-XSW) spectra of Mo/SiC/Si/SiC multilayers (Muramatsu et al., Jpn. J. Appl. Phys., 41 (2002) 4250.) were simulated by the use of the calculation method for TEY spectra of multilayers. The existence of a 2Angstrom thick SiO2 and a 18Angstrom thick Mo layers on the periodic Mo/SiC/Si/SiC multilayer was confirmed. In addition, the simulation study on Mo/Si multilayers covered with top Mo layers was performed. The TEY-XSW spectra were sensitive to the thickness of the top Mo layer as for the spectral shapes and peak positions. It was made clear that the TEY-XSW method is useful to elucidate the multilayer structure near the top layer.
引用
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页码：1126 / 1129
页数：4
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