Omnidirectional investigation of two-dimensional periodic nanostructure arrays by a two-axis Lloyd's mirror interferometer

被引：1

作者：

Jiang, Haitao ^{[1
]}

Zhuang, Zhe ^{[1
]}

Zhang, Xiong ^{[1
]}

Li, Cheng ^{[1
]}

Chen, Hu ^{[1
]}

Fan, Aijie ^{[1
]}

Chen, Shuai ^{[1
]}

Luo, Xuguang ^{[1
]}

Cui, Yiping ^{[1
]}

机构：

[1] Southeast Univ, Adv Photon Ctr, Nanjing 210096, Jiangsu, Peoples R China

来源：

RESULTS IN PHYSICS | 2020年 / 18卷

基金：

中国国家自然科学基金;

关键词：

Lloyd's interferometer; Three-beam interference; Polarization modulation; 2D dot/hole arrays; LASER INTERFERENCE LITHOGRAPHY; FABRICATION; GRATINGS; CALCULUS;

D O I：

10.1016/j.rinp.2020.103225

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Two-dimensional periodic patterns with various periods and shapes were investigated via a novel two-axis Lloyd's mirror interferometer, which allows the two mirrors to rotate independently. We created a theoretical model to reveal the relationships of all parameters in the system configuration and corresponding periodic arrays including the shapes of each nanostructure pattern by the polarization modulation. The wafer-level non-uniformity of the periodic arrays depends on the size of the expanded laser beams. Finally, we developed software with a friendly user interface to provide easy access to the theoretical model that configures the system and designs nanostructure arrays.

引用

页数：11

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