Full Aperture CO2 Laser Process to Improve Laser Damage Resistance of Fused Silica Optical Surface

被引：9
|
作者：
Liao, Wei [1 ]
Zhang, Chuanchao [1 ]
Sun, Xiaofen [1 ]
Zhang, Lijuan [1 ]
Yuan, Xiaodong [1 ]
机构：
[1] China Acad Engn Phys, Res Ctr Laser Fus, Mianyang 621900, Peoples R China
来源：
ADVANCES IN CONDENSED MATTER PHYSICS | 2014年 / 2014卷
关键词：
D O I：
10.1155/2014/676108
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
An improved method is presented to scan the full-aperture optical surface rapidly by using galvanometer steering mirrors. In contrast to the previous studies, the scanning velocity is faster by several orders of magnitude. The velocity is chosen to allow little thermodeposition thus providing small and uniform residual stress. An appropriate power density is set to obtain a lower processing temperature. The proper parameters can help to prevent optical surface from fracturing during operation at high laser flux. S-on-1 damage test results show that the damage threshold of scanned area is approximately 40% higher than that of untreated area.
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页数：5
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