Nano-Crystalline Diamond Films with Pineapple-Like Morphology Grown by the DC Arcjet vapor Deposition Method

被引:1
|
作者
Li Bin [1 ]
Zhang Qin-Jian [2 ]
Shi Yan-Chao [3 ]
Li Jia-Jun [3 ]
Li Hong [1 ]
Lu Fan-Xiu [1 ]
Chen Guang-Chao [3 ]
机构
[1] Univ Sci & Technol Beijing, Sch Met & Ecol Engn, Beijing 100083, Peoples R China
[2] Beijing Jiaotong Univ, Sch Mech Elect & Control Engn, Beijing 100044, Peoples R China
[3] Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
基金
中国国家自然科学基金;
关键词
NANOCRYSTALLINE DIAMOND; THIN-FILMS; ULTRANANOCRYSTALLINE DIAMOND; ELECTRICAL-PROPERTIES; CVD; METHANE; RAMAN; BIAS;
D O I
10.1088/0256-307X/31/8/088104
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
A nano-crystlline diamond film is grown by the dc arcjet chemical vapor deposition method. The film is characterized by scanning electron microscopy, high-resolution transmission electron microscopy (HRTEM), x-ray diffraction (XRD) and Raman spectra, respectively. The nanocrystalline grains are averagely with 80 nm in the size measured by XRD, and further proven by Raman and HRTEM. The observed novel morphology of the growth surface, pineapple-like morphology, is constructed by cubo-octahedral growth zones with a smooth faceted top surface and coarse side surfaces. The as-grown film possesses (100) dominant surface containing a little amorphous sp(2) component, which is far different from the nano-crystalline film with the usual cauliflower-like morphology.
引用
收藏
页数:3
相关论文
共 50 条
  • [1] Single crystalline diamond grown by repositioning substrate in DC arcjet plasma enhanced chemical vapor deposition
    Chen, G. C.
    Li, B.
    Yan, Z. Q.
    Lu, F. X.
    DIAMOND AND RELATED MATERIALS, 2012, 21 : 83 - 87
  • [2] Deposition of Nano-Crystalline Diamond Films of Spherical Shell
    Li, Duosheng
    Zhou, Xianliang
    Zuo, Dunwen
    Zou, Aihua
    JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE, 2012, 9 (09) : 1511 - 1514
  • [3] Preparation of Nano-Crystalline Diamond Films on Poly-Crystalline Diamond Thick Films by Microwave Plasma Enhanced Chemical Vapor Deposition
    熊礼威
    汪建华
    满卫东
    翁俊
    刘长林
    Plasma Science and Technology, 2010, (03) : 310 - 313
  • [4] Preparation of Nano-Crystalline Diamond Films on Poly-Crystalline Diamond Thick Films by Microwave Plasma Enhanced Chemical Vapor Deposition
    Xiong Liwei
    Wang Jianhua
    Man Weidong
    Weng Jun
    Liu Changlin
    PLASMA SCIENCE & TECHNOLOGY, 2010, 12 (03) : 310 - 313
  • [5] Preparation of Nano-Crystalline Diamond Films on Poly-Crystalline Diamond Thick Films by Microwave Plasma Enhanced Chemical Vapor Deposition
    熊礼威
    汪建华
    满卫东
    翁俊
    刘长林
    Plasma Science and Technology, 2010, 12 (03) : 310 - 313
  • [6] Nano-crystalline diamond films prepared by microwave argon plasma vapor deposition on optical glass
    Yang, WB
    Kong, X
    Yang, S
    Duan, XF
    Lü, FX
    VACUUM, 2002, 68 (01) : 49 - 55
  • [7] Nano-Crystalline Diamond Films Grown by Radio-Frequency Inductively Coupled Plasma Jet Enhanced Chemical Vapor Deposition
    石彦超
    李佳君
    刘浩
    左勇刚
    白旸
    孙占峰
    马殿礼
    陈广超
    Chinese Physics Letters, 2015, (08) : 181 - 184
  • [8] Nano-Crystalline Diamond Films Grown by Radio-Frequency Inductively Coupled Plasma Jet Enhanced Chemical Vapor Deposition
    石彦超
    李佳君
    刘浩
    左勇刚
    白旸
    孙占峰
    马殿礼
    陈广超
    Chinese Physics Letters, 2015, 32 (08) : 181 - 184
  • [9] Nano-Crystalline Diamond Films Grown by Radio-Frequency Inductively Coupled Plasma Jet Enhanced Chemical Vapor Deposition
    Shi Yan-Chao
    Li Jia-Jun
    Liu Hao
    Zuo Yong-Gang
    Bai Yang
    Sun Zhan-Feng
    Ma Dian-Li
    Chen Guang-Chao
    CHINESE PHYSICS LETTERS, 2015, 32 (08)
  • [10] Deposition and Boron Doping of Nano-Crystalline Diamond Thin Films on Poly-Crystalline Diamond Thick Films
    熊礼威
    汪建华
    刘繁
    满卫东
    翁俊
    刘鹏飞
    Plasma Science and Technology, 2012, (10) : 905 - 908