Simulations of submicron MOSFETs in 2H-, 4H-and 6H-SiC

In this paper, we present numerical studies of the high frequency performance of a submicron MOSFET in 2H-, 4H- and 6H-SiC. The studies are based on simulations where commercial two-dimensional drift-diffusion and hydrodynamic carrier transport models have been used. The results have been compared with those obtained from full band Monte Carlo simulations. The Monte Carlo carrier transport model is based on data from a full potential band structure calculation using the Local Density Approximation to the Density Functional Theory. In 6H-SiC the bulk transport properties in the direction perpendicular to the c-axis, are slightly lower than in 2H- and 4H-SiC. However, in the direction parallel to the c-axis the transport properties are considerably less favourable than in the other two polytypes. The effects of these differences, on surface mobility device performance and carrier energy, have been studied.