Studies on a magnetron source

被引:0
|
作者
Moehs, DP [1 ]
机构
[1] Fermilab Natl Accelerator Lab, Batavia, IL 60510 USA
关键词
D O I
暂无
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
In working toward a less noisy H-. magnetron source, a new diagnostic tool consisting of a scannable Faraday Cup Array has been developed and installed on the Fermilab H-. ion source test bench. The array consists of 14 identical Faraday cups with I mm diameter entrance holes spaced 6.4 mm apart. H-. beam currents of 50 to 80 mA with a radius of roughly 3 to 4 cm at the collector are routinely produced by the magnetron. Local current density measurements made as a function of acceleration voltage, sample time during the pulse, and background pressure reveal space charge compensation and beam self-focusing. An optical means of measuring simultaneously the local current density and local phase space parameters is also being investigated. These measurements should shed further light on how the current and beam divergence is distributed over the beam cross section.
引用
收藏
页码:115 / 120
页数:6
相关论文
共 50 条
  • [21] CUT-OFF PHENOMENA IN MAGNETRON ION SOURCE
    TOSIC, D
    NUCLEAR INSTRUMENTS & METHODS, 1965, 38 (DEC): : 26 - &
  • [22] Direct measurement of thrust induced by a magnetron sputtering source
    Takahashi, Kazunori
    Miura, Hidemasa
    APPLIED PHYSICS LETTERS, 2021, 118 (15)
  • [23] Magnetron Discharge-Based Boron Ion Source
    Vizir, Alexey
    Oks, Efim
    Yushkov, Georgy
    Shandrikov, Maxim
    PROCEEDINGS OF THE 17TH INTERNATIONAL CONFERENCE ON ION SOURCES, 2018, 2011
  • [24] Plasma source based on an unbalanced magnetron sputtering system
    Borisov, D. P.
    Slabodchikov, V. A.
    Kuznetsov, V. M.
    5TH INTERNATIONAL CONGRESS ON ENERGY FLUXES AND RADIATION EFFECTS 2016, 2017, 830
  • [25] Hollow cathode magnetron ion source with axial extraction
    Rev Sci Instrum, 3 pt 2 (1224):
  • [26] OPERATIONAL EXPERIENCE WITH THE BNL MAGNETRON H- SOURCE
    WITKOVER, RL
    AIP CONFERENCE PROCEEDINGS, 1984, (111) : 398 - 409
  • [27] A HIGHEST RATE SELF-SPUTTERING MAGNETRON SOURCE
    KUKLA, R
    KRUG, T
    LUDWIG, R
    WILMES, K
    VACUUM, 1990, 41 (7-9) : 1968 - 1970
  • [28] The plasma properties adjacent to the target in a magnetron sputtering source
    Bradley, JW
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 1996, 5 (04): : 622 - 631
  • [29] Hollow cathode magnetron ion source with axial extraction
    Miljevic, VI
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (03): : 1224 - 1226
  • [30] HOLLOW-CATHODE MAGNETRON ION-SOURCE
    MILJEVIC, V
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1984, 55 (01): : 121 - 123