共 50 条
- [42] Low temperature plasma etching for Si3N4 waveguide applications JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2008, 26 (02): : 253 - 258
- [43] Si3N4/SiO2/Si waveguide grating for fluorescent biosensors INTEGRATED OPTICS DEVICES III, 1999, 3620 : 109 - 116
- [44] A directional coupling scheme for efficient coupling between Si3N4 photonic and hybrid slot-based plasmonic waveguides INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XXI, 2017, 10106