Photothermal modulation of laser diode wavelength: application to sinusoidal phase-modulating interferometer for displacement measurements

被引：17
|
作者：
Wang, XF [1 ]
Wang, XZ [1 ]
Qian, F [1 ]
Chen, G [1 ]
Ghen, GT [1 ]
Fang, ZJ [1 ]
机构：
[1] Acad Sinica, Shanghai Inst Opt & Fine Mech, Informat Opt Lab, Shanghai 201800, Peoples R China
来源：
OPTICS AND LASER TECHNOLOGY | 1999年 / 31卷 / 08期
基金：
中国国家自然科学基金;
关键词：
optical testing; photothermal effect; interferometer;
D O I：
10.1016/S0030-3992(99)00114-0
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In this paper, a novel laser-diode (LD) sinusoidal phase-modulating (SPM) interferometer, which utilizes a photothermal technique for LD wavelength modulation, is proposed to measure displacements with a nanometer accuracy. In conventional LD-SPM interferometers, the LD intensity modulation is concurrent with the wavelength modulation, which increases measurement errors. Using the photothermal technique, the LD wavelength modulation can be accomplished with negligible concomitant intensity modulation, and the measurement errors are thus eliminated. The computer simulations and experiment results verify the usefulness of this novel interferometer. (C) 2000 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：559 / 564
页数：6
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