Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer

被引：6
|
作者：
Zhang, Ming [1 ,2 ]
Ni, Chang [1 ,2 ]
Zhu, Yu [1 ,2 ]
Wang, Leijie [1 ,2 ]
Hu, Chuxiong [1 ,2 ]
Hu, Jinchun [1 ,2 ]
机构：
[1] Tsinghua Univ, Dept Mech Engn, State Key Lab Tribol, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Beijing Lab Precis Ultra Precis Mfg Equipment & C, Beijing 100084, Peoples R China
来源：
CHINESE OPTICS LETTERS | 2017年 / 15卷 / 10期
基金：
中国国家自然科学基金;
关键词：
FREQUENCY-MODULATION;
D O I：
10.3788/COL201715.101201
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A signal processing method of realizing a large-range displacement measurement in a sinusoidal phase-modulating laser diode interferometer is proposed. The method of obtaining the dynamic value of the effective sinusoidal phase-modulating depth is detailed, and the residual amplitude modulation is also taken into account. Numerical simulations and experiments are carried out to compare this method with the traditional one. We prove that, with this method, the sinusoidal phase-modulating laser diode interferometer can realize a centimeter-level displacement measurement range with high precision, which is much better than the traditional method.
引用
收藏
页数：5
相关论文
共 50 条
  • [1] Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer
    张鸣
    倪畅
    朱煜
    王磊杰
    胡楚雄
    胡金春
    ChineseOpticsLetters, 2017, 15 (10) : 60 - 64
  • [2] Sinusoidal phase-modulating laser diode interferometer for wide range displacement measurement
    Zhang, Ming
    Ni, Chang
    Zhu, Yu
    Hu, Chuxiong
    Hu, Jinchun
    Wang, Leijie
    Ding, Siqi
    APPLIED OPTICS, 2017, 56 (20) : 5685 - 5691
  • [3] Sinusoidal phase-modulating interferometer insensitive to intensity modulation of a laser diode for displacement measurement
    Wang, Bofan
    Wang, Xiangzhao
    Sasaki, Osami
    Li, Zhongliang
    APPLIED OPTICS, 2012, 51 (12) : 1939 - 1944
  • [4] Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement
    Zhang, C
    Wang, XZ
    OPTICAL ENGINEERING, 2004, 43 (12) : 3008 - 3013
  • [5] Displacement sensor by a sinusoidal phase-modulating laser diode interferometer using optical fibers
    Sasaki, O
    Arakawa, Y
    Suzuki, T
    2005 PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, 2005, : 1014 - 1015
  • [6] DOUBLE SINUSOIDAL PHASE-MODULATING LASER DIODE INTERFEROMETER FOR DISTANCE MEASUREMENT
    SASAKI, O
    YOSHIDA, T
    SUZUKI, T
    APPLIED OPTICS, 1991, 30 (25): : 3617 - 3621
  • [7] Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer
    Suzuki, T
    Kobayashi, K
    Sasaki, O
    APPLIED OPTICS, 2000, 39 (16) : 2646 - 2652
  • [8] Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer
    Suzuki, Takamasa
    Kobayashi, Katsuyuki
    Sasaki, Osami
    Applied Optics, 2000, 39 (16): : 2646 - 2652
  • [9] Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer
    何国田
    王向朝
    曾爱军
    唐锋
    黄炳杰
    ChineseOpticsLetters, 2007, (04) : 211 - 214
  • [10] Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer
    He, Guotian
    Wang, Xiangzhao
    Zeng, Aijun
    Tang, Feng
    Huang, Bingjie
    CHINESE OPTICS LETTERS, 2007, 5 (04) : 211 - 214
12345