Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer

被引：6
|
作者：
Zhang, Ming [1 ,2 ]
Ni, Chang [1 ,2 ]
Zhu, Yu [1 ,2 ]
Wang, Leijie [1 ,2 ]
Hu, Chuxiong [1 ,2 ]
Hu, Jinchun [1 ,2 ]
机构：
[1] Tsinghua Univ, Dept Mech Engn, State Key Lab Tribol, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Beijing Lab Precis Ultra Precis Mfg Equipment & C, Beijing 100084, Peoples R China
来源：
CHINESE OPTICS LETTERS | 2017年 / 15卷 / 10期
基金：
中国国家自然科学基金;
关键词：
FREQUENCY-MODULATION;
D O I：
10.3788/COL201715.101201
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A signal processing method of realizing a large-range displacement measurement in a sinusoidal phase-modulating laser diode interferometer is proposed. The method of obtaining the dynamic value of the effective sinusoidal phase-modulating depth is detailed, and the residual amplitude modulation is also taken into account. Numerical simulations and experiments are carried out to compare this method with the traditional one. We prove that, with this method, the sinusoidal phase-modulating laser diode interferometer can realize a centimeter-level displacement measurement range with high precision, which is much better than the traditional method.
引用
收藏
页数：5
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