A radiation-crosslinkable thiophene copolymer

被引:10
|
作者
Kock, TJJM [1 ]
deRuiter, B [1 ]
机构
[1] TNO,PLAST & RUBBER RES INST,BRANCHE SPECIF RES CTR,NL-2600 AJ DELFT,NETHERLANDS
关键词
polythiophene; acrylated polythiophene; electron-beam lithography;
D O I
10.1016/0379-6779(96)80195-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Soluble polythiophenes with functional acrylic moieties in the side chain can be prepared by copolymerization of hexylthiophene and an acrylated thiophene. Short reaction times are required to inhibit the acrylic function to interfere with the oxidative thiophene polymerization with FeCl3. Preliminary irradiation experiments have shown that the copolymers act as negative resists in electron-beam (EB)-lithographic procedures, and can lead to conductive patterns.
引用
收藏
页码:215 / 218
页数:4
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