In-process roughness measurement on moving surfaces

被引:33
|
作者
Wong, PL [1 ]
Li, KY [1 ]
机构
[1] City Univ Hong Kong, Mfg Engn & Engn Management Dept, Kowloon, Hong Kong, Peoples R China
来源
OPTICS AND LASER TECHNOLOGY | 1999年 / 31卷 / 08期
关键词
in-process measurement; surface roughness; topography;
D O I
10.1016/S0030-3992(99)00108-5
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A new optical technique, which utilises the combined effects of interference and light scattering, was developed for surface roughness measurements. This paper presents the technique applicable to extracting the roughness of moving surfaces under high rotational speeds up to 3.7 m/s. The applicability of the technique to in-process roughness measurement was demonstrated with a cylindrical grinding process. (C) 2000 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:543 / 548
页数:6
相关论文
共 50 条
  • [31] IN-PROCESS WAFER TEST AND MEASUREMENT.
    Dey, Jim
    Semiconductor International, 1988, 11 (01) : 52 - 55
  • [32] Figure controlled turning by in-process measurement
    Saito, D
    Yazawa, T
    Kohno, T
    Kohno, S
    PRECISION ENGINEERING, NANOTECHNOLOGY, VOL 1, PROCEEDINGS, 1999, : 88 - 91
  • [33] In-process optical measurement of coating thickness
    Barton, JS
    De Frietas, JM
    Gregory, G
    Jennings, P
    Jones, AC
    Jones, JDC
    Kilpatrick, JM
    Plows, FL
    Spencer, P
    MEASUREMENT & CONTROL, 2000, 33 (01): : 11 - 14
  • [34] An experimental system for in-process measurement testing
    Gao, Y
    Tao, Z
    PROCEEDINGS OF THE 5TH INTERNATIONAL CONFERENCE ON FRONTIERS OF DESIGN AND MANUFACTURING, VOL 1, 2002, : 409 - 411
  • [35] IN-PROCESS MEASUREMENT OF TOOLS AND WORKPIECES.
    Hoschka, Juergen
    Energy & Automation, 1987, 9 : 24 - 27
  • [36] In-process gage frequency response measurement
    Longanbach, DM
    Kurfess, TR
    MECHATRONICS, 2001, 11 (06) : 745 - 757
  • [37] In-process optical measurement of coating thickness
    Barton, JS
    De Freitas, JM
    Gregory, G
    Jennings, P
    Jones, AC
    Jones, JDC
    Kilpatrick, JM
    Plows, FL
    Spencer, P
    MEASUREMENT & CONTROL, 2000, 33 (02): : U1 - U4
  • [38] In-process information storage on surfaces by turning operations
    Denkena, B.
    Boehnke, D.
    Spille, C.
    Dragon, R.
    CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2008, 57 (01) : 85 - 88
  • [39] In-process monitoring of grinding and polishing of optical surfaces
    van der Bijl, RJM
    Fähnle, OW
    van Brug, H
    Braat, JJM
    APPLIED OPTICS, 2000, 39 (19) : 3300 - 3303
  • [40] In-process monitoring of grinding and polishing of optical surfaces
    Van der Bijl, Robert-Jaap M.
    Fähnle, Oliver W.
    Van Brug, Hedser
    Braat, Joseph J.M.
    Applied Optics, 2000, 39 (19): : 3300 - 3303