In-process roughness measurement on moving surfaces

被引:33
|
作者
Wong, PL [1 ]
Li, KY [1 ]
机构
[1] City Univ Hong Kong, Mfg Engn & Engn Management Dept, Kowloon, Hong Kong, Peoples R China
来源
OPTICS AND LASER TECHNOLOGY | 1999年 / 31卷 / 08期
关键词
in-process measurement; surface roughness; topography;
D O I
10.1016/S0030-3992(99)00108-5
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A new optical technique, which utilises the combined effects of interference and light scattering, was developed for surface roughness measurements. This paper presents the technique applicable to extracting the roughness of moving surfaces under high rotational speeds up to 3.7 m/s. The applicability of the technique to in-process roughness measurement was demonstrated with a cylindrical grinding process. (C) 2000 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:543 / 548
页数:6
相关论文
共 50 条
  • [1] In-process measurement of surface roughness using light scattering
    Mid Sweden Univ, Ostersund, Sweden
    Wear, 1-2 (54-58):
  • [2] Approaches to In-process Measurement of Surface Roughness in Cylindrical Grinding
    Tachikawa, T.
    Ohashi, K.
    Tago, M.
    Tsukamoto, S.
    ADVANCES IN ABRASIVE TECHNOLOGY XIII, 2010, 126-128 : 684 - 689
  • [3] In-process measurement of surface roughness using light scattering
    Persson, U
    WEAR, 1998, 215 (1-2) : 54 - 58
  • [4] A new in-process measurement method for wafer surface roughness
    Guo, Ruipeng
    Tao, Zhengsu
    ICEPT: 2007 8TH INTERNATIONAL CONFERENCE ON ELECTRONICS PACKAGING TECHNOLOGY, PROCEEDINGS, 2007, : 637 - 640
  • [5] Optical methods for in-process roughness measurement of rotationally symmetric workpieces
    Huhnke, B
    TECHNISCHES MESSEN, 1998, 65 (7-8): : 272 - 279
  • [6] Rapid in-process measurement of surface roughness using adaptive optics
    Fuh, Yiin Kuen
    Hsu, Kuo Chan
    Fan, Jia Ren
    OPTICS LETTERS, 2012, 37 (05) : 848 - 850
  • [7] SURFACE-ROUGHNESS MEASUREMENT BY ULTRASONIC SENSING FOR IN-PROCESS MONITORING
    SHIN, YC
    OH, SJ
    COKER, SA
    JOURNAL OF ENGINEERING FOR INDUSTRY-TRANSACTIONS OF THE ASME, 1995, 117 (03): : 439 - 447
  • [8] A reflective fiber optic sensor for surface roughness in-process measurement
    Liu, JC
    Yamazaki, K
    Zhou, Y
    Matsumiya, S
    JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME, 2002, 124 (03): : 515 - 522
  • [9] In-process measurement of surface roughness based on optical fiber sensor
    Li, Yafei
    Xie, Zhusheng
    Zhongguo Jixie Gongcheng/China Mechanical Engineering, 2007, 18 (04): : 411 - 414
  • [10] SIMULTANEOUS IN-PROCESS INSPECTION OF SURFACE FORM AND ROUGHNESS OF MACHINED SCULPTURED SURFACES
    PHILPOTT, ML
    MITCHELL, SE
    TOBOLSKI, JF
    GREEN, PA
    JOURNAL OF ENGINEERING FOR INDUSTRY-TRANSACTIONS OF THE ASME, 1995, 117 (03): : 430 - 438