Single-mode operation of optically pumped membrane buried heterostructure distributed-feedback lasers

被引:2
|
作者
Okamoto, T [1 ]
Nunoya, N [1 ]
Onodera, Y [1 ]
Tamura, S [1 ]
Arai, S [1 ]
机构
[1] Tokyo Inst Technol, Res Ctr Quantum Effect Elect, Meguro Ku, Tokyo 1528552, Japan
来源
关键词
DFB laser; membrane; benzocyclobutene; GaInAsP/InF; CH4/H-2-RIE; OMVPE regrowth;
D O I
10.1143/JJAP.41.L249
中图分类号
O59 [应用物理学];
学科分类号
摘要
1.5 mum-wavelength GaInAsP/InP membrane buried heterostructure distributed-feedback laser consisting of deeply, etched single-quantum-well wire-like active regions was realized using low damage CH4/H-2 reactive ion etching and embedding growth by the organo-metallic vapor phase epitaxy technique. A threshold pump power of 40 mW and a sub-mode suppression-ratio of 36 dB were obtained for a 142 nm-thick semiconductor membrane core layer with a cavity length of 120 mum and a stripe width of 2 mum under room-temperature continuous wave optical pumping by a 970 nm wavelength laser diode.
引用
收藏
页码:L249 / L251
页数:3
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