Structural and optical properties of CVD thin tungsten oxide films

被引：0
|
作者：
Gogova, D
Gesheva, K
Szekeres, A
Sendova-Vassileva, M
机构：
[1] Bulgarian Acad Sci, Cent Lab Solar Energy & New Energy Sources, BG-1784 Sofia, Bulgaria
[2] Bulgarian Acad Sci, Inst Solid State Phys, BG-1784 Sofia, Bulgaria
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1999年 / 176卷 / 02期
关键词：
D O I：
10.1002/(SICI)1521-396X(199912)176:2<969::AID-PSSA969>3.0.CO;2-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Thin amorphous and polycrystalline tungsten oxide films were prepared by chemical vapour deposition at atmospheric pressure from a metalorganic precursor - tungsten hexacarbonyl. The dependence of the structural and optical properties of tungsten oxide films on the technological conditions has been investigated by XRD, Raman spectroscopy and spectroscopic ellipsometry.
引用
收藏
页码：969 / 984
页数：16
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