Structural and optical properties of CVD thin tungsten oxide films

被引：0
|
作者：
Gogova, D
Gesheva, K
Szekeres, A
Sendova-Vassileva, M
机构：
[1] Bulgarian Acad Sci, Cent Lab Solar Energy & New Energy Sources, BG-1784 Sofia, Bulgaria
[2] Bulgarian Acad Sci, Inst Solid State Phys, BG-1784 Sofia, Bulgaria
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1999年 / 176卷 / 02期
关键词：
D O I：
10.1002/(SICI)1521-396X(199912)176:2<969::AID-PSSA969>3.0.CO;2-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Thin amorphous and polycrystalline tungsten oxide films were prepared by chemical vapour deposition at atmospheric pressure from a metalorganic precursor - tungsten hexacarbonyl. The dependence of the structural and optical properties of tungsten oxide films on the technological conditions has been investigated by XRD, Raman spectroscopy and spectroscopic ellipsometry.
引用
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页码：969 / 984
页数：16
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