Higher frequency surface acoustic wave linear motor

被引：0
|
作者：
Kurosawa, MK [1 ]
Higuchi, T [1 ]
Takasaki, M [1 ]
机构：
[1] Univ Tokyo, Grad Sch Engn, Dept Precis Engn, Bunkyo Ku, Tokyo 1138656, Japan
来源：
PRECISION ENGINEERING, NANOTECHNOLOGY, VOL 1, PROCEEDINGS | 1999年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：514 / 517
页数：4
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