Deposited silicon high-speed integrated electro-optic modulator

被引：93

作者：

Preston, Kyle ^{[1
]}

Manipatruni, Sasikanth ^{[1
]}

Gondarenko, Alexander ^{[2
]}

Poitras, Carl B. ^{[1
]}

Lipson, Michal ^{[1
]}

机构：

[1] Cornell Univ, Sch Elect & Comp Engn, Ithaca, NY 14853 USA

[2] Cornell Univ, Sch Appl & Engn Phys, Ithaca, NY 14853 USA

来源：

OPTICS EXPRESS | 2009年 / 17卷 / 07期

基金：

美国国家科学基金会;

关键词：

CARRIER-DEPLETION; OPTICAL MODULATION; ON-CHIP; RESONATORS; COMPACT;

D O I：

10.1364/OE.17.005118

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate a micrometer-scale electro-optic modulator operating at 2.5 Gbps and 10 dB extinction ratio that is fabricated entirely from deposited silicon. The polycrystalline silicon material exhibits properties that simultaneously enable high quality factor optical resonators and sub-nanosecond electrical carrier injection. We use an embedded p(+)n(-)n(+) diode to achieve optical modulation using the free carrier plasma dispersion effect. Active optical devices in a deposited microelectronic material can break the dependence on the traditional single layer silicon-on-insulator platform and help lead to monolithic large-scale integration of photonic networks on a microprocessor chip. (C) 2009 Optical Society of America

引用

页码：5118 / 5124

页数：7

共 50 条

[1] Silicon High-Speed Electro-Optic Modulator
Alloatti, L.
Korn, D.
Hillerkuss, D.
Vallaitis, T.
Li, J.
Bonk, R.
Palmer, R.
Schellinger, T.
Koos, C.
Freude, W.
Leuthold, J.
Fournier, M.
Fedeli, J.
Barklund, A.
Dinu, R.
Wieland, J.
Bogaerts, W.
Dumon, P.
Baets, R.
[J]. 2010 7TH IEEE INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP), 2010, : 195 - 197
[2] Electro-Optic Organic Crystal Silicon High-Speed Modulator
Korn, D.
Jazbinsek, M.
Palmer, R.
Baier, M.
Alloatti, L.
Yu, H.
Bogaerts, W.
Lepage, G.
Verheyen, P.
Absil, P.
Guenter, P.
Koos, C.
Freude, W.
Leuthold, J.
[J]. IEEE PHOTONICS JOURNAL, 2014, 6 (02):
[3] High-Speed Silicon Electro-Optic Microring Modulator for Optical Interconnects
Malacarne, Antonio
Gambini, Fabrizio
Faralli, Stefano
Klamkin, Jonathan
Poti, Luca
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 2014, 26 (10) : 1042 - 1044
[4] High-speed silicon electro-optic modulator based on a single multimode waveguide
Zhou, Gangqiang
Zhou, Linjie
Guo, Yuyao
Chen, Shuhuang
Fu, Zhiming
Lu, Liangjun
Chen, Jianping
[J]. 2019 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC), 2019,
[5] Compact, Low-Power, High-Speed Silicon Electro-Optic Modulator
Gan, F.
Spector, S. J.
Geis, M. W.
Grein, M. E.
Schulein, R. T.
Yoon, J. U.
Lyszczarz, T. M.
Kaertner, F. X.
[J]. 2007 CONFERENCE ON LASERS & ELECTRO-OPTICS/QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2007), VOLS 1-5, 2007, : 640 - +
[6] A High-Speed Electro-Optic Modulator with Optimized Electrode Positions
Mahrous, Hany
Gad, Michael
El Sabbagh, Mona
Fedawy, Mostafa
Fikry, W.
[J]. PROCEEDINGS OF 2018 13TH INTERNATIONAL CONFERENCE ON COMPUTER ENGINEERING AND SYSTEMS (ICCES), 2018, : 530 - 535
[7] Integrated silicon carbide electro-optic modulator
Powell, Keith
Li, Liwei
Shams-Ansari, Amirhassan
Wang, Jianfu
Meng, Debin
Sinclair, Neil
Deng, Jiangdong
Loncar, Marko
Yi, Xiaoke
[J]. NATURE COMMUNICATIONS, 2022, 13 (01)
[8] Integrated silicon carbide electro-optic modulator
Keith Powell
Liwei Li
Amirhassan Shams-Ansari
Jianfu Wang
Debin Meng
Neil Sinclair
Jiangdong Deng
Marko Lončar
Xiaoke Yi
[J]. Nature Communications, 13
[9] 2.5 Gbps Electro-optic Modulator in Deposited Silicon
Preston, Kyle
Manipatruni, Sasikanth
Poitras, Carl B.
Lipson, Michal
[J]. 2009 CONFERENCE ON LASERS AND ELECTRO-OPTICS AND QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2009), VOLS 1-5, 2009, : 1273 - 1274
[10] Low Vpp, ultralow-energy, compact, high-speed silicon electro-optic modulator
Dong, Po
Liao, Shirong
Feng, Dazeng
Liang, Hong
Zheng, Dawei
Shafiiha, Roshanak
Kung, Cheng-Chih
Qian, Wei
Li, Guoliang
Zheng, Xuezhe
Krishnamoorthy, Ashok V.
Asghari, Mehdi
[J]. OPTICS EXPRESS, 2009, 17 (25): : 22484 - 22490

← 1 2 3 4 5 →