Synthesis of Polystyrene Thin Films by Means of an Atmospheric-Pressure Plasma Torch and a Dielectric Barrier Discharge

被引:39
|
作者
Merche, Delphine [1 ]
Poleunis, Claude [2 ]
Bertrand, Patrick [2 ]
Sferrazza, Michele [3 ]
Reniers, Francois [1 ]
机构
[1] Univ Libre Bruxelles, Analyt & Interfacial Chem Lab, Dept Chem, Fac Sci, B-1050 Brussels, Belgium
[2] Catholic Univ Louvain, Unite Physicochim & Phys Mat, B-1348 Louvain, Belgium
[3] Univ Libre Bruxelles, Lab Phys Expt Interfaces, Dept Phys, Fac Sci, B-1050 Brussels, Belgium
关键词
Plasma CVD; plasma materials-processing applications; plasmas; plastics; POLYMERIZED STYRENE FILMS; PHOTOELECTRON-SPECTROSCOPY; SURFACE-ANALYSIS; DEPOSITION; COATINGS; GAS; AIR;
D O I
10.1109/TPS.2009.2014165
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
In this paper, the deposition and characterization of plasma-polymerized polystyrene (pp-PS) using PECVD under atmospheric pressure on a variety of substrates was investigated. An atmospheric RF plasma torch and an HF dielectric-barrier-discharge (DBD) system were used to deposit thin pp-PS coatings on PTFE, HDPE, stainless steel, glass, and silicon wafer. The styrene vapor was carried by Ar or He. The pp-PS films were characterized by Fourier transform infrared spectroscopy (FTIR) (infrared reflection absorption spectroscopy), X-ray photoelectron spectroscopy (XPS), water contact angle (WCA), static secondary ion mass spectroscopy (SSIMS), and optical microscopy, and the plasma phase was studied by optical-emission spectroscopy. The major features that characterize PS are present in the FTIR, SSIMS, and XPS spectra of our films, although some differences are observed between pp-PS and their conventionally polymerized counterparts: oxygenation, branching, degree of cross-linking, and unsaturation. According to the WCA and XPS results, the films deposited by the RF plasma torch (placed in a Plexiglass chamber) are more oxygenated than those deposited by DBD, which is operated under a much more controlled atmosphere. A comparison of the chemical structure of the deposited coatings (branching, cross-linking) as a function of the nature of the carrier gas was established by FTIR: pp-PS synthesized in the presence of Ar (for both processes) exhibit more branching and a higher degree of cross-linking than pp-PS synthesized with He as the main plasma gas. The optical microscopy points out a diversity of structures that depend on the nature of the substrate and the plasma parameters.
引用
收藏
页码:951 / 960
页数:10
相关论文
共 50 条
  • [11] A nonequilibrium, atmospheric-pressure argon plasma torch for deposition of thin silicon dioxide films
    Kasih, Tota Pirdo
    Kuroda, Shin-ichi
    Kubota, Hitoshi
    CHEMICAL VAPOR DEPOSITION, 2007, 13 (04) : 169 - 175
  • [12] Deposition of Polyacrylic Acid Films by Means of an Atmospheric Pressure Dielectric Barrier Discharge
    Morent, Rino
    De Geyter, Nathalie
    Van Vlierberghe, Sandra
    Vanderleyden, Els
    Dubruel, Peter
    Leys, Christophe
    Schacht, Etienne
    PLASMA CHEMISTRY AND PLASMA PROCESSING, 2009, 29 (02) : 103 - 117
  • [13] Atmospheric-pressure plasma CVD of TiO2 photocatalytic films using surface dielectric barrier discharge
    Di, Lan-Bo
    Li, Xiao-Song
    Shi, Chuan
    Xu, Yong
    Zhao, De-Zhi
    Zhu, Ai-Min
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2009, 42 (03)
  • [14] Deposition of Polyacrylic Acid Films by Means of an Atmospheric Pressure Dielectric Barrier Discharge
    Rino Morent
    Nathalie De Geyter
    Sandra Van Vlierberghe
    Els Vanderleyden
    Peter Dubruel
    Christophe Leys
    Etienne Schacht
    Plasma Chemistry and Plasma Processing, 2009, 29 : 103 - 117
  • [15] Comparison of the barrier torch discharge and torch discharge at atmospheric pressure
    Brablec, A
    Slavícek, P
    Klíma, M
    Kapicka, V
    Behnke, JF
    Sícha, M
    CZECHOSLOVAK JOURNAL OF PHYSICS, 2002, 52 : 561 - 566
  • [16] Observation of Plasma Bullet Propagation in Atmospheric-Pressure Dielectric Barrier Discharge With Coaxial Electrode
    Ok, Jung-Woo
    Won, Mi-Sook
    Kim, Dong-Hyun
    Lee, Hae June
    Lee, Ho-Jun
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2011, 39 (11) : 2344 - 2345
  • [17] Generation and Electrical Diagnostic of an Atmospheric-Pressure Dielectric Barrier Discharge
    Anghel, Sorin Dan
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2011, 39 (03) : 871 - 876
  • [18] Generation of atmospheric-pressure homogeneous dielectric barrier discharge in air
    Liu, Wenzheng
    Ma, Chuanlong
    Li, Zhiyi
    Wang, Tahan
    Tian, Jia
    EPL, 2017, 118 (04)
  • [19] Surface modification of polystyrene by dielectric barrier discharge in atmospheric pressure
    Wang, Changquan
    Zhang, Guixin
    Fang, Zhi
    He, Xiangning
    Xu, Yong
    Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology, 2009, 29 (06): : 695 - 699
  • [20] Generation of Uniform Discharge by Dielectric Barrier Discharge Device in Atmospheric-pressure Air
    Osawa, Naoki
    Yoshioka, Yoshio
    Hanaoka, Ryoichi
    Mochizuki, Yutarou
    Kobayashi, Yusuke
    Yamada, Yuta
    ELECTRICAL ENGINEERING IN JAPAN, 2012, 180 (04) : 1 - 9