Optical correlation diagnostics of rough surfaces - Statistical and fractal approach

被引：0
|
作者：
Angelsky, OV [1 ]
Maksimyak, PP [1 ]
Burkovets, DN [1 ]
Grigiraschuk, IM [1 ]
机构：
[1] Chernivtsi Natl Univ, Correlat Opt Dept, UA-58012 Chernovtsy, Ukraine
来源：
SIXTH INTERNATIONAL CONFERENCE ON CORRELATION OPTICS | 2003年 / 5477卷
关键词：
optical correlation diagnostics; rough surfaces fractal surface; dimensional parameters;
D O I：
10.1117/12.559766
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
New feasibilities are considered for optical correlation diagnostics of rough surfaces with different distributions of irregularities. The influence of deviations of the height surface roughness distribution from a Gaussian probability distribution on the accuracy of optical analysis is discussed. The possibilities for optical diagnostics of fractal surface structures are shown and the set of statistical and dimensional parameters of the scattered fields for surface roughness diagnostics is determined. Fast operating measuring devices for roughness control are proposed.
引用
收藏
页码：114 / 130
页数：17
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