Micro magnetic thin-film sensor using LC resonance

被引:17
|
作者
Takezawa, M
Kikuchi, H
Ishiyama, K
Yamaguchi, M
Arai, KI
机构
[1] Research Institute of Electrical Communication, Tohoku University, Aoba-ku, Sendai 980-77
关键词
D O I
10.1109/20.617957
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper reports the performance of a new micro magnetic thin-film magnetic field sensor, which makes use of LC resonance of the sensor element as well as the impedance change due to the permeability change of the magnetic film. A large impedance change of 105% was achieved at a carrier frequency of 100 MHz. The large change was realized when the LC resonance frequency of the sensor element was lower than the frequency at which the eddy-current losses increased.
引用
收藏
页码:3400 / 3402
页数:3
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