Strong asymmetric effect of lattice mismatch on epilayer structure in thin-film deposition

被引:14
|
作者
Hsiao, Pai-Yi [1 ]
Tsai, Zhuo-Han [1 ]
Huang, Jia-Hong [1 ]
Yu, Ge-Ping [1 ]
机构
[1] Natl Tsing Hua Univ, Dept Engn & Syst Sci, Hsinchu 300, Taiwan
关键词
adsorbed layers; epitaxial layers; molecular dynamics method; MISFIT DISLOCATIONS; SURFACE; GROWTH; NI; DIFFUSION; MECHANISM; SCALE; CU; PD;
D O I
10.1103/PhysRevB.79.155414
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We investigate the heteroepitaxial growth of thin film deposited on a (001) substrate via molecular-dynamics simulations, using six fcc transition metals as our modeling systems. By studying the radial distribution function in the film layers, we demonstrate the importance of the sign of lattice mismatch on the layer structure. For positive lattice mismatches, the film favors pseudomorphic growth, whereas for negative mismatches, a sharp transition happens within the first few monolayers of adatoms and the film layers are transformed into the close-packed (111) structure. We propose a way to quantify the compositional percentage of different planar structures in an epilayer and demonstrate the strong asymmetric effect between the tensile and compressive cases of deposition. How temperature affects the asymmetry is also discussed.
引用
收藏
页数:5
相关论文
共 50 条
  • [41] SUBSTRATE PREPARATION FOR THIN-FILM DEPOSITION - A SURVEY
    MATTOX, DM
    THIN SOLID FILMS, 1985, 124 (01) : 3 - 10
  • [42] THIN-FILM DEPOSITION TECHNIQUES FOR ELECTRONIC MATERIALS
    BRIONES, F
    VACUUM, 1987, 37 (5-6) : 491 - 491
  • [43] Structure and electrochemistry of thin-film oxides grown by laser-pulsed deposition
    C. Julien
    E. Haro-Poniatowski
    O. M. Hussain
    C. V. Ramana
    Ionics, 2001, 7 : 165 - 171
  • [44] Thin-film deposition of polymers by vacuum degradation
    Gritsenko, KP
    Krasovsky, AM
    CHEMICAL REVIEWS, 2003, 103 (09) : 3607 - 3649
  • [45] THIN-FILM DEPOSITION FOR FAR IR TRANSMISSION
    ZHANG, XH
    FONTENEAU, G
    LUCAS, J
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1989, 44 (245): : 99 - 103
  • [46] Wet Deposition Process for Thin-Film Transistors
    Shen, S. C.
    Pan, C. T.
    Chang, S. J.
    Lin, S. C.
    MATERIALS AND MANUFACTURING PROCESSES, 2014, 29 (04) : 498 - 503
  • [47] A DIGITAL THIN-FILM DEPOSITION RATE METER
    CERUTTI, G
    INSTRUMENT PRACTICE, 1968, 22 (11): : 940 - &
  • [48] THIN-FILM DEPOSITION INVESTIGATION ON TEX GLASSES
    ZHANG, XH
    FONTENEAU, G
    LUCAS, J
    PERRIN, A
    LI, ZZ
    SERGENT, M
    HALIDE GLASSES V, 1988, 32 : 453 - 456
  • [49] CONTINUUM MODEL OF THIN-FILM DEPOSITION AND GROWTH
    BERNOFF, AJ
    LICHTER, S
    PHYSICAL REVIEW B, 1989, 39 (15): : 10560 - 10569
  • [50] PLASMA PROCESSES IN ACTIVATED THIN-FILM DEPOSITION
    LUNK, A
    SCHMIDT, M
    CONTRIBUTIONS TO PLASMA PHYSICS, 1988, 28 (03) : 275 - 292